- Capacity: 25
- Overall Size: 68mm (2.68in) x 143mm (5.63in) x 59mm (2.32in)
- D1 Dimension – distance from the H-shaped end surface to the center line of the first pocket
- (SEMI Std): 13.97mm (0.55in)
- Pocket Spacing – The distance between pocket center lines: 4.76mm (0.19in)
- Pocket Flat – The width of the pocket at its narrowest distance: 1.02mm (0.04in)
- Perfluoroalkoxy (PFA) is a high purity process wafer carrier material with high heat resistance and outstanding chemical resistance.
CR50A-01LF PFA 50mm Wafer Carrier
H-shaped end for equipment interface. U-shaped end wall. Wash slots in side walls. Precision cleaned by Pozzetta Micro Clean. A72-20M-0215 equivalent.