50mm PFA Wafer Carrier, 25 Slot

CR50A-01LF PFA 50mm Wafer Carrier

H-shaped end for equipment interface. U-shaped end wall. Wash slots in side walls. Precision cleaned by Pozzetta Micro Clean. A72-20M-0215 equivalent.

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カテゴリー: Wafer Carrier

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説明

Capacity: 25
Overall Size: 68mm (2.68in) x 143mm (5.63in) x 59mm (2.32in)
D1 Dimension – distance from the H-shaped end surface to the center line of the first pocket
(SEMI Std): 13.97mm (0.55in)
Pocket Spacing – The distance between pocket center lines: 4.76mm (0.19in)
Pocket Flat – The width of the pocket at its narrowest distance: 1.02mm (0.04in)
Perfluoroalkoxy (PFA) is a high purity process wafer carrier material with high heat resistance and outstanding chemical resistance.