- Capacity: 25
- Overall Size: 234mm (9.21in) x 203mm (8in) x 219mm (8.6in)
- D1 Dimension – distance from the H shaped end surface to the center line of the first pocket
- (SEMI Std): 25.4mm (1in) Pocket Spacing – The distance between pocket center lines: 6.35mm (0.25in)
- Pocket Flat – The width of the pocket at its narrowest distance: 1.8mm (0.07in)
- Material Description: Perfluoroalkoxy (PFA) is a high purity process wafer carrier material with high heat resistance and outstanding chemical resistance.
CR200G-01LF PFA 200mm Wafer Carrier
H-shaped end for equipment interface. Solid end wall. Wash slots in side walls for increased cleaning and drying efficiency.
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