H-shaped end for equipment interface. Solid End Wall. Wash slots are opened in the bottom half of side walls. Excellent heat resistance and rigidity. Ideal for use in high temperature applications such as wafer baking, diffusion and CVD. Additional pocket with pocket flat of 2.17mm for dummy wafer. Precision cleaned by Pozzetta Micro Clean.
We'd be happy to discuss your application by phone, in person or online.
Capacity: 25 (+1)
Overall Size: 235mm (9.25in) x 209mm (8in) x 219mm (8.62in)
D1 Dimension – distance from the H shaped end surface to the center line of the first pocket
(SEMI Std): 25.89mm
Pocket Spacing – The distance between pocket center lines: 6.35mm
Pocket Flat – The width of the pocket at its narrowest distance: 3.0mm
Material Description PEEK is a semicrystalline thermoplastic with extraordinary mechanical properties. The material is highly heat and chemical resistant.
Wafer Carrier
Wafer Carrier
Wafer Carrier
Wafer Carrier
Wafer Carrier
Wafer Carrier
Wafer Carrier
Wafer Carrier
