CR100A-DMF PFA 100mm Wafer Carrier

H-shaped end for equipment interface/ U-shaped end wall. Wash slots in side walls. Precision cleaned by Pozzetta Micro Clean. A182-39MU-0215 equivalent

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  • Capacity: 25
  • Overall Size: 125mm (4.92in) x 143mm (5.63in) x 114mm (4.49in)
  • D1 Dimension – distance from the Hshaped end surface to the center line of the first pocket (SEMI Std): 14.55mm (0.57in)
  • Pocket Spacing – The distance between pocket center lines: 4.76mm (0.19in)
  • Pocket Flat – The width of the pocket at its narrowest distance: 1.52mm (0.06in)
  • Material Description Perfluoroalkoxy (PFA) is a high purity process wafer carrier material with high heat resistance and outstanding chemical resistance.