- Capacity: 25
- Overall Size: 125mm (4.92in) x 143mm (5.63in) x 114mm (4.49in)
- D1 Dimension – distance from the Hshaped end surface to the center line of the first pocket (SEMI Std): 14.55mm (0.57in)
- Pocket Spacing – The distance between pocket center lines: 4.76mm (0.19in)
- Pocket Flat – The width of the pocket at its narrowest distance: 1.52mm (0.06in)
- Material Description Perfluoroalkoxy (PFA) is a high purity process wafer carrier material with high heat resistance and outstanding chemical resistance.
CR100A-DMF PFA 100mm Wafer Carrier
H-shaped end for equipment interface/ U-shaped end wall. Wash slots in side walls. Precision cleaned by Pozzetta Micro Clean. A182-39MU-0215 equivalent