- Capacity: 26
- Overall Size: 234mm (9.21in) x 210mm (8.26in) x 156mm (6.14in)
- D1 Dimension – distance from the H shaped end surface to the center line of the first pocket
- (SEMI Std): 25.4mm (1in)
- Pocket Spacing – The distance between pocket center lines: 6.35mm (0.25in)
- Pocket Flat – The width of the pocket at its narrowest distance: 1.65mm (0.065in)
- Material Description Perfluoroalkoxy (PFA) is a high purity process wafer carrier material with high heat resistance and outstanding chemical resistance.
CR200L-ALF PFA 200mm Wafer Carrier
26th slot holds dummy wafer that shields production wafers and increases yield. H-shaped end for equipment interface. E-shaped handle on the end wall. Low profile. Increased cleaning and drying efficiency. Precision cleaned by Pozzetta Micro Clean.