- Capacity: 25
- Overall Size: 94mm (3.7in) x 142mm (5.59in) x 83mm (3.27in)
- D1 Dimension – distance from the H-shaped end surface to the center line of the first pocket
- (SEMI Std): 13.97mm (0.55in)
- Pocket Spacing – The distance between pocket center lines: 4.76mm (0.19in)
- Pocket Flat – The width of the pocket at its narrowest distance: 1.52mm (0.06in)
CR75C-01LF PFA 75mm Wafer Carrier
H-shaped end for equipment interface. U-shaped end wall. Wash slots in side walls. Precision cleaned by Pozzetta Micro Clean. A82M-0215 equivalent.