- Capacity: 26
- Overall Size: 178mm (7in) x 148mm (5.82in) x 114mm (4.48in)
- D1 Dimension – distance from the H shaped end surface to the center line of the first pocket
- (SEMI Std): 14.54mm (0.57in)
- Pocket Spacing – The distance between pocket center lines: 4.76mm (0.19in)
- Pocket Flat – The width of the pocket at its narrowest distance: 1.40mm (0.05in)
- Perfluoroalkoxy (PFA) is a high purity process wafer carrier material with high heat resistance and outstanding chemical resistance.
CR150L-06-H-LF 26 Slot, PFA, 150mm Wafer Carrier
26th slot holds dummy wafer that shields production wafers and increases yield. H-shaped end for equipment interface. E-shaped handle on end wall. Open side wall for increased cleaning and drying efficiency.