Zephyr: God of the West wind. Gentle breeze.
FOUP (Front Opening Unified Pod)
- With diffuser (Improved cleanliness, low humidity, uniform diffusion) Patent Pend.
- Conductive (ESD measures, cleanliness improvement)
- Low moisture absorption (control particle generation)
- Low outgassing (yield improvement)
- 26-wafer capacity
- Shading (prevents wafer oxidation)
- Snap-fit construction (no metal screws)
- SEMI Standard compliant
- Option: Wafer size or capacity changeable (200mm wafer, double pitch)
