CR75-O1LF

CR75C-01LF PFA 75mm Wafer Carrier

H-shaped end for equipment interface. U-shaped end wall. Wash slots in side walls. Precision cleaned by Pozzetta Micro Clean. A82M-0215 equivalent.

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Category: Wafer Carrier

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Description

Capacity: 25
Overall Size: 94mm (3.7in) x 142mm (5.59in) x 83mm (3.27in)
D1 Dimension – distance from the H-shaped end surface to the center line of the first pocket
(SEMI Std): 13.97mm (0.55in)
Pocket Spacing – The distance between pocket center lines: 4.76mm (0.19in)
Pocket Flat – The width of the pocket at its narrowest distance: 1.52mm (0.06in)