- Standard Mechanical Interface Compatible.
- Door Base and Seal.
- Pod Shell made from low outgassing E80 resin.
- Superior ESD Performance.
- Plastic PEEK Screws.
- High-performance PTFE filter.
- 0.3DOP% removal rating.
- RFID holder for optional RFID tag.
- UV Control shell available.
- 10mm space above reticle surface available.
RSP200 Reticle SMIF Pod | Photomask Compacts
Accommodates 6025 mask. Haze Control: E80 resin has the lowest levels of SO4 and NH4 of any Inherently Dissipative Polymer. Door open/close rod mechanism is made of plastic with high sliding performance which reduces particle generation. Plastic PEEK screws used for easy disassembly/exchange of parts and easier maintenance of sliding part. Proprietary design of reticle support and retainer make contact with only the reticle edge. Metal-free attachment eliminates reticle scratching. Clear shell window provides visibility to inspect reticle location and barcode.
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