- Pod cover
- Reticle Retainer
- Robotic Handling Flange
- Pod Door
- SEMI Std.]Compliant E111
- Pod door available with or without N2 Valve
- Pod door available with adsorbent filter
RSP150 Reticle SMIF Pod | Photomask Compacts
For 6025 reticle. Metal-free attachment eliminates reticle scratching. Robotic handling flange with 7 holes for easier manual handling. Reticle Retainer system provides ESD path to ground and enhanced strength. Low outgassing polycarbonate reduces the number of outgassing variables. Clear PC window provides visibility to inspect reticle location and barcode. Pozzetta Positive Response confirms your order, your shipment, and our quality.
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