CR200L-ALFa

CR200L-ALFb

CR200L-ALF PFA 200mm Wafer Carrier

26th slot holds dummy wafer that shields production wafers and increases yield. H-shaped end for equipment interface. E-shaped handle on the end wall. Low profile. Increased cleaning and drying efficiency. Precision cleaned by Pozzetta Micro Clean.

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Category: Wafer Carrier

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Description

Capacity: 26
Overall Size: 234mm (9.21in) x 210mm (8.26in) x 156mm (6.14in)
D1 Dimension – distance from the H shaped end surface to the center line of the first pocket
(SEMI Std): 25.4mm (1in)
Pocket Spacing – The distance between pocket center lines: 6.35mm (0.25in)
Pocket Flat – The width of the pocket at its narrowest distance: 1.65mm (0.065in)
Material Description Perfluoroalkoxy (PFA) is a high purity process wafer carrier material with high heat resistance and outstanding chemical resistance.