- Capacity: 25
- Overall Size: 178mm (7in) x 144mm (5.67in) x 165mm (6.50in)
- D1 Dimension – distance from the H-shaped end surface to the center line of the first pocket
- (SEMI Std): 14.54mm (0.57in)
- Pocket Spacing – The distance between pocket center lines: 4.76mm (0.19in)
- Pocket Flat – The width of the pocket at its narrowest distance: 1.52mm (0.06in)
- Material Description: Perfluoroalkoxy (PFA) is a high purit y process wafer carrier material with hi gh heat resistance and outstanding chemical resistance.
CR150A-RMF 150mm Wafer Carrier
H-shaped end for equipment interface. U-shaped end wall. Wash slots in side walls. Precision cleaned by Pozzetta Micro Clean. A182-60MU-0215 equivalent.
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