- Capacity: 50
- Overall Size: 277mm x 189mm x 192mm
- D1 Dimension – distance from the H shaped end surface to the center line of the first pocket: 21.95mm
- Wafer Pitch – distance between pocket center lines: 4.76mm
- Pocket Flat – The width of the pocket at its narrowest distance: 1.8mm
- Material Description: Perfluoroalkoxy (PFA) is a high purity process wafer carrier material with high heat resistance and outstanding chemical resistance.
Accommodates 125mm square substrate. For automated transport. Enhanced torsional rigidity. Reinforced flange. Material Description: Polycarbonate
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