CR150A-04LF-1S

CR150A-04LF-1Sb

CR150A-04LF-1S 150mm Wafer Carrier

H-shaped end for equipment interface. Solid end wall. Wash slots in side walls. Precision cleaned by Pozzetta Micro Clean. A194-60MB-0215 equivalent.

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カテゴリー: Wafer Carrier

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説明

Capacity: 25
Overall Size: 178mm (7in) x 143mm (5.63in) x 171mm (6.73in)
D1 Dimension – distance from the H shaped end surface to the center line of the first pocket
(SEMI Std): 14.54mm (0.57in)
Pocket Spacing – The distance between pocket center lines: 4.76mm (0.19in)
Pocket Flat – The width of the pocket at its narrowest distance: 1.52mm (0.06in)
Material Description: Perfluoroalkoxy (PFA) is a high purity process wafer carrier material with high heat resistance and outstanding chemical resistance.